Argon 3d Model. Obj fbx dae. The gas flows into the process chamber from two 2 inch ports and the gas is extracted through a single 4 inch port.
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3d plasma modeling is possible to do in comsol.
3d plasma modeling is possible to do in comsol. A plasma is formed in the chamber beneath the dielectric window which contains argon gas at low pressure 20 mtorr. Login sign up upload. Download files like share.